Laser assisted CVD and MOCVD growth of semiconductor films

J. J. Coleman, James Gary Eden

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Summary form only given, as follows. The use of photochemistry in the gas phase in the growth of elemental and III-V compound semiconductor films by CVD and MOCVD is a rapidly growing field, and recent experiments involving the laser-assisted growth of GaAs and the demonstration of ammonia as a photosensitizer are described.

Original languageEnglish (US)
Title of host publicationCONFERENCE ON LASERS AND ELECTRO-0PTICS
Editors Anon
PublisherPubl by IEEE
Pages428
Number of pages1
ISBN (Print)1557520860
StatePublished - 1989
EventSummaries of Papers Presented at the Conference on Lasers and Electro-Optics - Baltimore, MD, USA
Duration: Apr 24 1989Apr 28 1989

Other

OtherSummaries of Papers Presented at the Conference on Lasers and Electro-Optics
CityBaltimore, MD, USA
Period4/24/894/28/89

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Coleman, J. J., & Eden, J. G. (1989). Laser assisted CVD and MOCVD growth of semiconductor films. In Anon (Ed.), CONFERENCE ON LASERS AND ELECTRO-0PTICS (pp. 428). Publ by IEEE.