Laser assisted CVD and MOCVD growth of semiconductor films

J. J. Coleman, James Gary Eden

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Summary form only given, as follows. The use of photochemistry in the gas phase in the growth of elemental and III-V compound semiconductor films by CVD and MOCVD is a rapidly growing field, and recent experiments involving the laser-assisted growth of GaAs and the demonstration of ammonia as a photosensitizer are described.

Original languageEnglish (US)
Title of host publicationCONFERENCE ON LASERS AND ELECTRO-0PTICS
Editors Anon
PublisherPubl by IEEE
Pages428
Number of pages1
ISBN (Print)1557520860
StatePublished - 1989
EventSummaries of Papers Presented at the Conference on Lasers and Electro-Optics - Baltimore, MD, USA
Duration: Apr 24 1989Apr 28 1989

Other

OtherSummaries of Papers Presented at the Conference on Lasers and Electro-Optics
CityBaltimore, MD, USA
Period4/24/894/28/89

Fingerprint

Metallorganic chemical vapor deposition
Chemical vapor deposition
Semiconductor materials
Photosensitizers
Lasers
Photochemical reactions
Ammonia
Demonstrations
Gases
Experiments
III-V semiconductors

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Coleman, J. J., & Eden, J. G. (1989). Laser assisted CVD and MOCVD growth of semiconductor films. In Anon (Ed.), CONFERENCE ON LASERS AND ELECTRO-0PTICS (pp. 428). Publ by IEEE.

Laser assisted CVD and MOCVD growth of semiconductor films. / Coleman, J. J.; Eden, James Gary.

CONFERENCE ON LASERS AND ELECTRO-0PTICS. ed. / Anon. Publ by IEEE, 1989. p. 428.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Coleman, JJ & Eden, JG 1989, Laser assisted CVD and MOCVD growth of semiconductor films. in Anon (ed.), CONFERENCE ON LASERS AND ELECTRO-0PTICS. Publ by IEEE, pp. 428, Summaries of Papers Presented at the Conference on Lasers and Electro-Optics, Baltimore, MD, USA, 4/24/89.
Coleman JJ, Eden JG. Laser assisted CVD and MOCVD growth of semiconductor films. In Anon, editor, CONFERENCE ON LASERS AND ELECTRO-0PTICS. Publ by IEEE. 1989. p. 428
Coleman, J. J. ; Eden, James Gary. / Laser assisted CVD and MOCVD growth of semiconductor films. CONFERENCE ON LASERS AND ELECTRO-0PTICS. editor / Anon. Publ by IEEE, 1989. pp. 428
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