@inproceedings{af5946403363404ba61d3682e72325e5,
title = "Laser assisted CVD and MOCVD growth of semiconductor films",
abstract = "Summary form only given, as follows. The use of photochemistry in the gas phase in the growth of elemental and III-V compound semiconductor films by CVD and MOCVD is a rapidly growing field, and recent experiments involving the laser-assisted growth of GaAs and the demonstration of ammonia as a photosensitizer are described.",
author = "Coleman, {J. J.} and Eden, {James G.}",
year = "1989",
language = "English (US)",
isbn = "1557520860",
series = "CONFERENCE ON LASERS AND ELECTRO-0PTICS",
publisher = "Publ by IEEE",
pages = "428",
editor = "Anon",
booktitle = "CONFERENCE ON LASERS AND ELECTRO-0PTICS",
note = "Summaries of Papers Presented at the Conference on Lasers and Electro-Optics ; Conference date: 24-04-1989 Through 28-04-1989",
}