Large scale microdischarge arrays: Fabrication and characterization

S. J. Park, J. Chen, C. Liu, J. G. Eden

Research output: Contribution to conferencePaperpeer-review


Microdischarge devices and arrays having inverted square pyramidal cathodes were discussed. The integration of the new photonic devices into silicon has various applications including displays, chemical sensors and frequency standards. The results showed that the combination polymer/Si3N4/SiO2 dielectric extends the device lifetime drastically with respect to employing only the polymer film as the dielectric.

Original languageEnglish (US)
Number of pages2
StatePublished - 2001
EventConference on Lasers and Electro-Optics (CLEO) - Baltimore, MD, United States
Duration: May 6 2001May 11 2001


OtherConference on Lasers and Electro-Optics (CLEO)
Country/TerritoryUnited States
CityBaltimore, MD

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering


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