Large scale microdischarge arrays: Fabrication and characterization

S. J. Park; J. Chen; C. Liu; J. G. Eden

Large scale microdischarge arrays: Fabrication and characterization

S. J. Park, J. Chen, C. Liu, J. G. Eden

Electrical and Computer Engineering

Research output: Contribution to conference › Paper › peer-review

Abstract

Microdischarge devices and arrays having inverted square pyramidal cathodes were discussed. The integration of the new photonic devices into silicon has various applications including displays, chemical sensors and frequency standards. The results showed that the combination polymer/Si₃N₄/SiO₂ dielectric extends the device lifetime drastically with respect to employing only the polymer film as the dielectric.

Original language	English (US)
Pages	177-178
Number of pages	2
State	Published - 2001
Event	Conference on Lasers and Electro-Optics (CLEO) - Baltimore, MD, United States Duration: May 6 2001 → May 11 2001

Other

Other	Conference on Lasers and Electro-Optics (CLEO)
Country/Territory	United States
City	Baltimore, MD
Period	5/6/01 → 5/11/01

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

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title = "Large scale microdischarge arrays: Fabrication and characterization",

abstract = "Microdischarge devices and arrays having inverted square pyramidal cathodes were discussed. The integration of the new photonic devices into silicon has various applications including displays, chemical sensors and frequency standards. The results showed that the combination polymer/Si3N4/SiO2 dielectric extends the device lifetime drastically with respect to employing only the polymer film as the dielectric.",

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AU - Chen, J.

AU - Liu, C.

AU - Eden, J. G.

PY - 2001

Y1 - 2001

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AB - Microdischarge devices and arrays having inverted square pyramidal cathodes were discussed. The integration of the new photonic devices into silicon has various applications including displays, chemical sensors and frequency standards. The results showed that the combination polymer/Si3N4/SiO2 dielectric extends the device lifetime drastically with respect to employing only the polymer film as the dielectric.

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EP - 178

Y2 - 6 May 2001 through 11 May 2001

ER -

Large scale microdischarge arrays: Fabrication and characterization

Abstract

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ASJC Scopus subject areas

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