@inproceedings{f392e9be82394964931b1146d0ae5a98,
title = "Large frequency tuning of Lithium Niobate laterally vibrating MEMS resonators via electric boundary reconfiguration",
abstract = "The paper presents a method for tuning the center frequency of Lithium Niobate (LN) laterally vibrating MEMS resonators (LVRs). This technique can be used to address the need for low-cost and miniature frequency-agile components of future programmable RF front-ends. The resonator center frequency is modified by changing the electrical boundary conditions imposed by the excitation electrodes. The underlying theory for the tuning mechanism is discussed and verified by experiments. The experimentally shown tuning range is 3%, which surpasses any demonstration of tuning for MEMS resonators. The predicted tuning range can be as high as 7%.",
keywords = "Lithium niobate, MEMS, laterally vibrating resonators, piezoelectric, reconfigurable RF front-end",
author = "Songbin Gong and Gianluca Piazza",
year = "2013",
doi = "10.1109/Transducers.2013.6627305",
language = "English (US)",
isbn = "9781467359818",
series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",
pages = "2465--2468",
booktitle = "2013 Transducers and Eurosensors XXVII",
note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",
}