Large frequency tuning of Lithium Niobate laterally vibrating MEMS resonators via electric boundary reconfiguration

Songbin Gong, Gianluca Piazza

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The paper presents a method for tuning the center frequency of Lithium Niobate (LN) laterally vibrating MEMS resonators (LVRs). This technique can be used to address the need for low-cost and miniature frequency-agile components of future programmable RF front-ends. The resonator center frequency is modified by changing the electrical boundary conditions imposed by the excitation electrodes. The underlying theory for the tuning mechanism is discussed and verified by experiments. The experimentally shown tuning range is 3%, which surpasses any demonstration of tuning for MEMS resonators. The predicted tuning range can be as high as 7%.

Original languageEnglish (US)
Title of host publication2013 Transducers and Eurosensors XXVII
Subtitle of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages2465-2468
Number of pages4
DOIs
StatePublished - 2013
Externally publishedYes
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
Duration: Jun 16 2013Jun 20 2013

Publication series

Name2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Country/TerritorySpain
CityBarcelona
Period6/16/136/20/13

Keywords

  • Lithium niobate
  • MEMS
  • laterally vibrating resonators
  • piezoelectric
  • reconfigurable RF front-end

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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