Large-area submicron replica molding of porous low-k dielectric films and application to photonic crystal biosensor fabrication

Ian D. Block; Leo L. Chan; Brian T. Cunningham

doi:10.1016/j.mee.2006.12.011

Large-area submicron replica molding of porous low-k dielectric films and application to photonic crystal biosensor fabrication

Ian D. Block, Leo L. Chan, Brian T. Cunningham

Research output: Contribution to journal › Article › peer-review

Abstract

We demonstrate a replica-molding method for submicron patterning of a low-index sol-gel nanoporous glass for the purpose of fabricating large-area (∼80 cm²) label-free photonic crystal optical biosensors. Scanning electron micrographs show the sol-gel exhibited minimal shrinkage and good substrate adhesion and depict precise and uniform pattern transfer over the fabricated area within the limits of measurement resolution. A unique characterization approach is described in which the photonic crystal optical resonance is used to accurately and quickly characterize the geometrical and material property uniformity over a large area. Uniformity within 1% was measured over an 80 cm² area. We suggest that this robust method is an excellent approach for photonic crystal sensor fabrication, and may also find applications in integrated optics and electronics.

Original language	English (US)
Pages (from-to)	603-608
Number of pages	6
Journal	Microelectronic Engineering
Volume	84
Issue number	4
DOIs	https://doi.org/10.1016/j.mee.2006.12.011
State	Published - Apr 2007

Keywords

Low-k
Optical biosensor
Replica molding
Sol-gel glass

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Surfaces, Coatings and Films
Atomic and Molecular Physics, and Optics

Online availability

10.1016/j.mee.2006.12.011

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title = "Large-area submicron replica molding of porous low-k dielectric films and application to photonic crystal biosensor fabrication",

abstract = "We demonstrate a replica-molding method for submicron patterning of a low-index sol-gel nanoporous glass for the purpose of fabricating large-area (∼80 cm2) label-free photonic crystal optical biosensors. Scanning electron micrographs show the sol-gel exhibited minimal shrinkage and good substrate adhesion and depict precise and uniform pattern transfer over the fabricated area within the limits of measurement resolution. A unique characterization approach is described in which the photonic crystal optical resonance is used to accurately and quickly characterize the geometrical and material property uniformity over a large area. Uniformity within 1% was measured over an 80 cm2 area. We suggest that this robust method is an excellent approach for photonic crystal sensor fabrication, and may also find applications in integrated optics and electronics.",

keywords = "Low-k, Optical biosensor, Replica molding, Sol-gel glass",

author = "Block, {Ian D.} and Chan, {Leo L.} and Cunningham, {Brian T.}",

note = "Funding Information: The authors gratefully acknowledge the National Science Foundation (BES 04-27657) and SRU Biosystems for providing financial support for this work, and Honeywell Electronic Materials for the donation of Nanoglass {\textregistered} low- k porous dielectric material. FIB work was carried out in the Center for Microanalysis of Materials, and thin-film characterization was performed in the Laser and Spectroscopy Facility of the Frederick Seitz Materials Research Laboratory, both at the University of Illinois and both of which are partially supported by the US Department of Energy under grant DEFG02-91-ER45439. The authors also extend their gratitude to the support staff of the Micro and Nanotechnology Laboratory at the University of Illinois at Urbana-Chamapaign.",

year = "2007",

month = apr,

doi = "10.1016/j.mee.2006.12.011",

language = "English (US)",

volume = "84",

pages = "603--608",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

number = "4",

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TY - JOUR

T1 - Large-area submicron replica molding of porous low-k dielectric films and application to photonic crystal biosensor fabrication

AU - Block, Ian D.

AU - Chan, Leo L.

AU - Cunningham, Brian T.

N1 - Funding Information: The authors gratefully acknowledge the National Science Foundation (BES 04-27657) and SRU Biosystems for providing financial support for this work, and Honeywell Electronic Materials for the donation of Nanoglass ® low- k porous dielectric material. FIB work was carried out in the Center for Microanalysis of Materials, and thin-film characterization was performed in the Laser and Spectroscopy Facility of the Frederick Seitz Materials Research Laboratory, both at the University of Illinois and both of which are partially supported by the US Department of Energy under grant DEFG02-91-ER45439. The authors also extend their gratitude to the support staff of the Micro and Nanotechnology Laboratory at the University of Illinois at Urbana-Chamapaign.

PY - 2007/4

Y1 - 2007/4

N2 - We demonstrate a replica-molding method for submicron patterning of a low-index sol-gel nanoporous glass for the purpose of fabricating large-area (∼80 cm2) label-free photonic crystal optical biosensors. Scanning electron micrographs show the sol-gel exhibited minimal shrinkage and good substrate adhesion and depict precise and uniform pattern transfer over the fabricated area within the limits of measurement resolution. A unique characterization approach is described in which the photonic crystal optical resonance is used to accurately and quickly characterize the geometrical and material property uniformity over a large area. Uniformity within 1% was measured over an 80 cm2 area. We suggest that this robust method is an excellent approach for photonic crystal sensor fabrication, and may also find applications in integrated optics and electronics.

AB - We demonstrate a replica-molding method for submicron patterning of a low-index sol-gel nanoporous glass for the purpose of fabricating large-area (∼80 cm2) label-free photonic crystal optical biosensors. Scanning electron micrographs show the sol-gel exhibited minimal shrinkage and good substrate adhesion and depict precise and uniform pattern transfer over the fabricated area within the limits of measurement resolution. A unique characterization approach is described in which the photonic crystal optical resonance is used to accurately and quickly characterize the geometrical and material property uniformity over a large area. Uniformity within 1% was measured over an 80 cm2 area. We suggest that this robust method is an excellent approach for photonic crystal sensor fabrication, and may also find applications in integrated optics and electronics.

KW - Low-k

KW - Optical biosensor

KW - Replica molding

KW - Sol-gel glass

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JO - Microelectronic Engineering

JF - Microelectronic Engineering

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ER -

Large-area submicron replica molding of porous low-k dielectric films and application to photonic crystal biosensor fabrication

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