We demonstrate a replica-molding method for submicron patterning of a low-index sol-gel nanoporous glass for the purpose of fabricating large-area (∼80 cm2) label-free photonic crystal optical biosensors. Scanning electron micrographs show the sol-gel exhibited minimal shrinkage and good substrate adhesion and depict precise and uniform pattern transfer over the fabricated area within the limits of measurement resolution. A unique characterization approach is described in which the photonic crystal optical resonance is used to accurately and quickly characterize the geometrical and material property uniformity over a large area. Uniformity within 1% was measured over an 80 cm2 area. We suggest that this robust method is an excellent approach for photonic crystal sensor fabrication, and may also find applications in integrated optics and electronics.

Original languageEnglish (US)
Pages (from-to)603-608
Number of pages6
JournalMicroelectronic Engineering
Issue number4
StatePublished - Apr 2007


  • Low-k
  • Optical biosensor
  • Replica molding
  • Sol-gel glass

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics


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