Large-area diamond film growth in a low-pressure flame

N. G. Glumac, D. G. Goodwin

Research output: Contribution to journalArticle

Abstract

Chemical vapor deposition of a large-area (13 cm2) polycrystalline diamond film by a low-pressure combustion technique has been demonstrated. Good film quality and uniformity are observed, and the technique offers several advantages over other large-area deposition methods, including simple scalability up to arbitrarily large substrates.

Original languageEnglish (US)
Pages (from-to)119-122
Number of pages4
JournalMaterials Letters
Volume18
Issue number3
DOIs
StatePublished - Dec 1993
Externally publishedYes

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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