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Langmuir probe study of a titanium pulsed filtered cathodic arc discharge
D. Andruczyk
, R. N. Tarrant
, B. W. James
, M. M.M. Bilek
, G. B. Warr
Research output
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peer-review
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Keyphrases
Rutile
100%
Electron Energy Distribution
100%
Langmuir Probe
100%
Cathodic Arc Discharge
100%
Filtered Cathodic Arc
100%
Probe Study
100%
Rise Time
66%
Electron Density
66%
Fall Time
66%
Teff
66%
I-V Curve
33%
Effective Temperature
33%
Plateau Region
33%
Ion Density
33%
Plasma Parameters
33%
Maxwellian
33%
Quasi-neutrality
33%
Non-Maxwellian
33%
Substrate Position
33%
Pulsed Cathodic Arc
33%
Effective Electron Temperature
33%
Ion Charge State
33%
Physics
Electron Energy
100%
Arc Discharge
100%
Electrostatic Probe
100%
Energy Distribution
75%
Electron Density
50%
Ion Charge
25%