Langmuir probe study of a titanium pulsed filtered cathodic arc discharge

D. Andruczyk, R. N. Tarrant, B. W. James, M. M.M. Bilek, G. B. Warr

Research output: Contribution to journalArticlepeer-review

Abstract

A Langmuir probe has been used to make measurements of plasma parameters as a function of time at the substrate position in a magnetically-filtered pulsed cathodic arc discharge. Electron density, ne, and effective electron temperature, Teff, were calculated as a function of time from the I-V curves. The Druyvesteyn method was used to determine the electron energy distribution. Ion density was calculated using the assumption of plasma quasi-neutrality and an average ion charge state. Results show that over the plateau region (350-600 νs) of the pulse, the electron energy distribution is Maxwellian with Teff ≤ Te ≤ (10 1) eV. During the rise and fall times of the pulse, the electron energy distribution is non-Maxwellian with an effective temperature of up to 15 to 20 eV during the rise time and ∼7 eV during the fall time. The electron density during the plateau is ne ≤ (3.0-6.0 0.5) × 1017 m -3.

Original languageEnglish (US)
Article number032
Pages (from-to)533-537
Number of pages5
JournalPlasma Sources Science and Technology
Volume15
Issue number3
DOIs
StatePublished - Aug 1 2006
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics

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