A Langmuir probe has been used to make measurements of plasma parameters as a function of time at the substrate position in a magnetically-filtered pulsed cathodic arc discharge. Electron density, ne, and effective electron temperature, Teff, were calculated as a function of time from the I-V curves. The Druyvesteyn method was used to determine the electron energy distribution. Ion density was calculated using the assumption of plasma quasi-neutrality and an average ion charge state. Results show that over the plateau region (350-600 νs) of the pulse, the electron energy distribution is Maxwellian with Teff ≤ Te ≤ (10 1) eV. During the rise and fall times of the pulse, the electron energy distribution is non-Maxwellian with an effective temperature of up to 15 to 20 eV during the rise time and ∼7 eV during the fall time. The electron density during the plateau is ne ≤ (3.0-6.0 0.5) × 1017 m -3.
ASJC Scopus subject areas
- Condensed Matter Physics