L2O-ILT: Learning to Optimize Inverse Lithography Techniques

Binwu Zhu, Su Zheng, Ziyang Yu, Guojin Chen, Yuzhe Ma, Fan Yang, Bei Yu, Martin D.F. Wong

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'L2O-ILT: Learning to Optimize Inverse Lithography Techniques'. Together they form a unique fingerprint.

Engineering & Materials Science