Isotope exchange in hydrogenated silicon-oxynitride (SiON) for 1.55μm optical waveguide applications

Jinju Lee, Kangguo Cheng, Joseph W. Lyding, Huub W.M. Salemink

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Isotope exchange in hydrogenated silicon-oxynitride (SiON) for 1.55μm optical waveguide applications'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds