Is your layout-density verification exact?A fast exact deep submicrometer density calculation algorithm

Keyphrases

• Deep Submicron 100%
• Density Calculation 100%
• Exact Algorithm 100%
• Calculation Algorithm 100%
• Layout Density 100%
• Performance Improvement 50%
• Design Rules 50%
• Manufacturing Process 50%
• Approximation Algorithms 50%
• Long Working Hours 50%
• Minimum Density 50%
• Control Problem 50%
• Performance Yield 50%
• Manufacturing Process Design 50%
• Performance Predictability 50%
• Feature Density 50%
• Density Control 50%
• Mask Layout 50%

Engineering

• Manufacturing Process 100%
• Exact Algorithm 100%
• Fundamental Problem 50%
• Process Design 50%
• Design Rule 50%
• Feature Density 50%

Computer Science

• Exact Algorithm 100%
• Fundamental Problem 50%
• Approximate Algorithm 50%