Is your layout density verification exact? A fast exact algorithm for density calculation

Keyphrases

• Density Calculation 100%
• Exact Algorithm 100%
• Layout Density 100%
• Manufacturing Process 66%
• Performance Improvement 33%
• Design Rules 33%
• Design Process 33%
• Approximation Algorithms 33%
• Maximum Density 33%
• Control Problem 33%
• Performance Yield 33%
• Performance Predictability 33%
• Feature Density 33%
• Density Control 33%
• Mask Layout 33%

Engineering

• Exact Algorithm 100%
• Manufacturing Process 33%
• Fundamental Problem 33%
• Process Design 33%
• Design Rule 33%
• Feature Density 33%

Computer Science

• Exact Algorithm 100%
• Fundamental Problem 33%
• Approximate Algorithm 33%