Irradiation Effects on EUV Nanolithography Collector Mirrors

J.p. Allain

Research output: Chapter in Book/Report/Conference proceeding › Other chapter/report contribution

Original language	English (US)
Title of host publication	Recent Advances in Nanofabrication Techniques and Applications
Editors	Bo Cui
Publisher	InTech
ISBN (Print)	978-953-307-602-7
DOIs	https://doi.org/10.5772/24316
State	Published - Dec 2 2011

Online availability

@inbook{9599462e38df42b7b43bc3d7ae4d7c9b,

title = "Irradiation Effects on EUV Nanolithography Collector Mirrors",

author = "J.p. Allain",

year = "2011",

month = dec,

day = "2",

doi = "10.5772/24316",

language = "English (US)",

isbn = "978-953-307-602-7",

editor = "Bo Cui",

booktitle = "Recent Advances in Nanofabrication Techniques and Applications",

publisher = "InTech",

}