Irradiation Effects on EUV Nanolithography Collector Mirrors

Research output: Chapter in Book/Report/Conference proceedingOther chapter contribution

Original languageEnglish (US)
Title of host publicationRecent Advances in Nanofabrication Techniques and Applications
EditorsBo Cui
PublisherInTech
ISBN (Print)978-953-307-602-7
DOIs
StatePublished - Dec 2 2011

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Nanolithography
Mirrors
Irradiation

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Allain, J. (2011). Irradiation Effects on EUV Nanolithography Collector Mirrors. In B. Cui (Ed.), Recent Advances in Nanofabrication Techniques and Applications [Chapter 19] InTech. DOI: 10.5772/24316

Irradiation Effects on EUV Nanolithography Collector Mirrors. / Allain, J.p.

Recent Advances in Nanofabrication Techniques and Applications. ed. / Bo Cui. InTech, 2011. Chapter 19.

Research output: Chapter in Book/Report/Conference proceedingOther chapter contribution

Allain, J 2011, Irradiation Effects on EUV Nanolithography Collector Mirrors. in B Cui (ed.), Recent Advances in Nanofabrication Techniques and Applications., Chapter 19, InTech. DOI: 10.5772/24316
Allain J. Irradiation Effects on EUV Nanolithography Collector Mirrors. In Cui B, editor, Recent Advances in Nanofabrication Techniques and Applications. InTech. 2011. Chapter 19. Available from, DOI: 10.5772/24316

Allain, J.p. / Irradiation Effects on EUV Nanolithography Collector Mirrors.

Recent Advances in Nanofabrication Techniques and Applications. ed. / Bo Cui. InTech, 2011. Chapter 19.

Research output: Chapter in Book/Report/Conference proceedingOther chapter contribution

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