Ion-Induced Surface Modification of EUV and VUV Plasma-Facing Collector Mirrors

Jean Paul Allain, Ahmed Hassanein, Martin Nieto, Vladimir Titov, Perry Plotkin, Edward Hinson, Daniel Rokusek, Christopher Chrobak, Matthew Hendricks, William Klimowych

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
JournalAslib Proceedings
Volume908
DOIs
StatePublished - Jan 1 2005

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