@book{3b83636809f64b61bbce85399f2ae592,
title = "Ion Implantation Technology: 17th International Conference on Ion Implantation Technology",
editor = "Seebauer, {Edmund Gerard} and Susan Felch and Amitabh Jain and Kondratenko, {Yevgeniy V.}",
year = "2008",
language = "English (US)",
isbn = "978-0-7354-0597-4",
series = "AIP Conference Proceedings",
publisher = "American Institute of Physics",
note = "17th International Conference on Ion Implantation Technology, IIT 2008 ; Conference date: 08-06-2008 Through 13-06-2008",
}