Ion Implantation Technology: 17th International Conference on Ion Implantation Technology

Edmund Gerard Seebauer (Editor), Susan Felch (Editor), Amitabh Jain (Editor), Yevgeniy V. Kondratenko (Editor)

Research output: Book/Report/Conference proceedingConference proceedingpeer-review

Original languageEnglish (US)
PublisherAmerican Institute of Physics
ISBN (Print)978-0-7354-0597-4
StatePublished - 2008
Event17th International Conference on Ion Implantation Technology, IIT 2008 - Monterey, United States
Duration: Jun 8 2008Jun 13 2008

Publication series

NameAIP Conference Proceedings
Volume1066

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