Ion beam nanopatterning of III-V semiconductors: consistency of experimental and simulation trends within a chemistry-driven theory

O. El-atwani, S. A. Norris, K. Ludwig, S. Gonderman, J. P. Allain

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@article{30e2f398aa164964a0f8bbcd785a1c32,

title = "Ion beam nanopatterning of III-V semiconductors: consistency of experimental and simulation trends within a chemistry-driven theory",

author = "O. El-atwani and Norris, {S. A.} and K. Ludwig and S. Gonderman and Allain, {J. P.}",

year = "2015",

month = dec,

day = "16",

doi = "10.1038/srep18207",

language = "English (US)",

volume = "5",

pages = "18207",

journal = "Scientific Reports",

issn = "2045-2322",

publisher = "Nature Research",

}

TY - JOUR

T1 - Ion beam nanopatterning of III-V semiconductors: consistency of experimental and simulation trends within a chemistry-driven theory

AU - El-atwani, O.

AU - Norris, S. A.

AU - Ludwig, K.

AU - Gonderman, S.

AU - Allain, J. P.

PY - 2015/12/16

Y1 - 2015/12/16

U2 - 10.1038/srep18207

DO - 10.1038/srep18207

M3 - Article

SN - 2045-2322

VL - 5

SP - 18207

JO - Scientific Reports

JF - Scientific Reports

ER -