Keyphrases
Induced Phase
100%
Infrared Spectroscopy
100%
Amorphous Silicon
100%
Phase Transition
100%
C-Si
100%
Real-time Infrared
100%
Hydrogen Plasma
37%
Transition Layer
25%
Atomic Hydrogen
25%
Real-time Process
25%
Process Monitor
25%
Glass Substrate
12%
High Temperature
12%
High Sensitivity
12%
Processing Conditions
12%
Hydrogen Bonds (H-bonds)
12%
Film Thickness
12%
Amorphous Silicon Thin Film
12%
Surface Coverage
12%
H-surfaces
12%
Spectroscopic Ellipsometry
12%
Thermal Desorption
12%
Microcrystalline
12%
Hydrogenated Amorphous Silicon
12%
Film Microstructure
12%
Infrared Reflectance Spectroscopy
12%
Bonding Configuration
12%
Hydrogenated
12%
Oxide Substrates
12%
Surface Species
12%
Si-H Bonds
12%
Hydrogen Coverage
12%
Initial Growth
12%
Hydrogenated Nanocrystalline Silicon
12%
Si Phase
12%
Hydrogen Treatment
12%
H Content
12%
H Concentration
12%
DC Reactive Magnetron Sputtering
12%
Material Science
Amorphous Silicon
100%
Film
50%
Surface (Surface Science)
30%
Oxide Compound
10%
Nucleation
10%
Desorption
10%
Film Thickness
10%
Magnetron Sputtering
10%
Microcrystalline Silicon
10%