@inproceedings{9865d3cc58164179802b21975114869e,
title = "Intrinsic resolving power of XUV diffraction gratings measured with Fizeau interferometry",
abstract = "We introduce a method for using Fizeau interferometry to measure the intrinsic resolving power of a diffraction grating. This method is more accurate than traditional techniques based on a long-trace profiler (LTP), since it is sensitive to long-distance phase errors not revealed by a d-spacing map. We demonstrate 50,400 resolving power for a mechanically ruled XUV grating from Inprentus, Inc.",
keywords = "Diffraction gratings, EUV, Fizeau, Interferometry, X-ray",
author = "Samuel Gleason and Jonathan Manton and Janet Sheung and Taylor Byrum and Cody Jensen and Lingyun Jiang and Joseph Dvorak and Ignace Jarrige and Peter Abbamonte",
note = "We gratefully acknowledge Z. Hussain, Y. D. Chuang, W. Yang, E. Gullikson, H. Padmore, and D. Voronov for enlightening discussions, and K. Kaznatcheev for sharing the Fizeau data in Fig. 6. This work was supported by National Science Foundation grant SBIR-1248644.; Advances in Metrology for X-Ray and EUV Optics VII 2017 ; Conference date: 06-08-2017 Through 07-08-2017",
year = "2017",
doi = "10.1117/12.2272616",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Asundi, {Anand Khrishna} and Haruhiko Ohashi and Lahsen Assoufid",
booktitle = "Advances in Metrology for X-Ray and EUV Optics VII",
}