Interdisciplinary laboratory course: "Chemistry and Transport in Semiconductor Materials Synthesis"

Edmund G. Seebauer, Alice Hollister, Yevgeniy Kondratenko

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Semiconductor fabrication technologies (including those at the nanoscale) draw upon a wide variety of disciplines, and rest upon a correspondingly diverse scientific and mathematical base. Few courses on device fabrication address "process science": The scientific and mathematical fundamentals underlying the design and optimization of plasma and thermal processes. There are relatively few universities with undergraduate programs focusing on nanoscale materials processing. This situation results partly from the exceptionally interdisciplinary nature of the field, which makes it difficult for any one department to claim "ownership." To address this lack, we are developing a laboratory course for upper-division undergraduates and graduate students called "Chemistry and Transport in Semiconductor Materials Synthesis." The course provides students with hands-on experimental and computational experiences in the processes and fundamentals that govern semiconductor device fabrication.

Original languageEnglish (US)
Title of host publicationNanoSingapore 2006
Subtitle of host publicationIEEE Conference on Emerging Technologies - Nanoelectronics - Proceedings
Pages232-234
Number of pages3
DOIs
StatePublished - Nov 14 2006
Event2006 IEEE Conference on Emerging Technologies - Nanoelectronics - Singapore, Singapore
Duration: Jan 10 2006Jan 13 2006

Publication series

NameNanoSingapore 2006: IEEE Conference on Emerging Technologies - Nanoelectronics - Proceedings
Volume2006

Other

Other2006 IEEE Conference on Emerging Technologies - Nanoelectronics
CountrySingapore
CitySingapore
Period1/10/061/13/06

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Seebauer, E. G., Hollister, A., & Kondratenko, Y. (2006). Interdisciplinary laboratory course: "Chemistry and Transport in Semiconductor Materials Synthesis". In NanoSingapore 2006: IEEE Conference on Emerging Technologies - Nanoelectronics - Proceedings (pp. 232-234). [1609718] (NanoSingapore 2006: IEEE Conference on Emerging Technologies - Nanoelectronics - Proceedings; Vol. 2006). https://doi.org/10.1109/NANOEL.2006.1609718