Interaction of free and bound microplasmas

S. H. Sung; Y. H. Kim; S. J. Park; J. G. Eden

doi:10.1109/TPS.2011.2165857

Interaction of free and bound microplasmas

S. H. Sung
, Y. H. Kim
, S. J. Park
, J. G. Eden

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Low-temperature microplasmas confined to quasi-ellipsoidal cavities have been observed to interact with free columnar filaments produced in a parallel plate dielectric barrier discharge structure. Small arrays of microcavities, fabricated into the interior surfaces of two glass plates separated by 80 μm, support stable glows having major and minor axes of 700 ± 50 and 540 ± 20 μm, respectively, for a Ne gas pressure of 300-760 Torr. Surrounding the bound (microcavity) plasmas are diffuse columnar microplasmas having a mean diameter and separation (pitch) of 136 ±10 and 485 ± 60 μm, respectively. Optical images of free microplasmas interacting with only two ∼700 μm-diameter cavities show microplasmas trapped both at the perimeters of the microcavities as well as along a line bisecting the microcavities.

Original language	English (US)
Article number	6029991
Pages (from-to)	2694-2695
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	39
Issue number	11 PART 1
DOIs	https://doi.org/10.1109/TPS.2011.2165857
State	Published - Nov 2011

Keywords

Microcavities
microplasmas
optical emission

ASJC Scopus subject areas

Nuclear and High Energy Physics
Condensed Matter Physics

Online availability

10.1109/TPS.2011.2165857

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title = "Interaction of free and bound microplasmas",

abstract = "Low-temperature microplasmas confined to quasi-ellipsoidal cavities have been observed to interact with free columnar filaments produced in a parallel plate dielectric barrier discharge structure. Small arrays of microcavities, fabricated into the interior surfaces of two glass plates separated by 80 μm, support stable glows having major and minor axes of 700 ± 50 and 540 ± 20 μm, respectively, for a Ne gas pressure of 300-760 Torr. Surrounding the bound (microcavity) plasmas are diffuse columnar microplasmas having a mean diameter and separation (pitch) of 136 ±10 and 485 ± 60 μm, respectively. Optical images of free microplasmas interacting with only two ∼700 μm-diameter cavities show microplasmas trapped both at the perimeters of the microcavities as well as along a line bisecting the microcavities.",

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note = "Manuscript received December 1, 2010; accepted March 22, 2011. Date of publication September 29, 2011; date of current version November 9, 2011. The work was supported in part by the NSF, DOE, and AFOSR. The authors are with the Department of Electrical and Computer Engineering, University of Illinois, Urbana, IL 61801 USA. Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TPS.2011.2165857 Fig. 1. Cross-sectional diagram of the dielectric barrier structure developed for the present studies.",

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Interaction of free and bound microplasmas

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