@inproceedings{e78fc1648c5541988ca6c4264d4f8a93,
title = "Inter-layer grating coupler on double-layer silicon nanomembranes",
abstract = "We present an adhesive bonding process to fabricate on-chip, double-layer, single crystalline silicon nanomembranes. Inter-layer coupling efficiency of 25\% with 35 nm 3dB bandwidth is demonstrated using subwavelength nanostructure based grating couplers.",
keywords = "Inter-layer grating coupler, silicon nanomembrane, subwavelength nanostructure",
author = "Yang Zhang and David Kwong and Xiaochuan Xu and Amir Hosseini and Yang, \{Sang Y.\} and Rogers, \{John A.\} and Chen, \{Ray T.\}",
year = "2013",
doi = "10.1109/OIC.2013.6552911",
language = "English (US)",
isbn = "9781467350617",
series = "2013 Optical Interconnects Conference, OI 2013",
pages = "35--36",
booktitle = "2013 Optical Interconnects Conference, OI 2013",
note = "2013 IEEE Optical Interconnects Conference, OI 2013 ; Conference date: 05-05-2013 Through 08-05-2013",
}