Inter-layer grating coupler on double-layer silicon nanomembranes

Yang Zhang, David Kwong, Xiaochuan Xu, Amir Hosseini, Sang Y. Yang, John A. Rogers, Ray T. Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present an adhesive bonding process to fabricate on-chip, double-layer, single crystalline silicon nanomembranes. Inter-layer coupling efficiency of 25% with 35 nm 3dB bandwidth is demonstrated using subwavelength nanostructure based grating couplers.

Original languageEnglish (US)
Title of host publication2013 Optical Interconnects Conference, OI 2013
Pages35-36
Number of pages2
DOIs
StatePublished - Aug 30 2013
Event2013 IEEE Optical Interconnects Conference, OI 2013 - Santa Fe, NM, United States
Duration: May 5 2013May 8 2013

Other

Other2013 IEEE Optical Interconnects Conference, OI 2013
CountryUnited States
CitySanta Fe, NM
Period5/5/135/8/13

Keywords

  • Inter-layer grating coupler
  • silicon nanomembrane
  • subwavelength nanostructure

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electronic, Optical and Magnetic Materials

Fingerprint Dive into the research topics of 'Inter-layer grating coupler on double-layer silicon nanomembranes'. Together they form a unique fingerprint.

Cite this