Integrations of slanted silicon nanostructures on 3D microstructures and it application in surface enhanced Raman spectroscopy

Zhida Xu, Jing Jiang, Manas Ranja Gartia, Gang Logan Liu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Black silicon with slanted nanopillar array on planar and microstructure was produced for surface-enhanced Raman spectroscopy (SERS). The angle dependence of etching angle and nanopillar slanted angle was investigated with scanning electron microscopy.

Original languageEnglish (US)
Title of host publication2012 IEEE Photonics Conference, IPC 2012
Pages552-553
Number of pages2
DOIs
StatePublished - Dec 1 2012
Event25th IEEE Photonics Conference, IPC 2012 - Burlingame, CA, United States
Duration: Sep 23 2012Sep 27 2012

Publication series

Name2012 IEEE Photonics Conference, IPC 2012

Other

Other25th IEEE Photonics Conference, IPC 2012
CountryUnited States
CityBurlingame, CA
Period9/23/129/27/12

Keywords

  • Angle-Controllable Nanopillar
  • Black Silicon
  • Polarized SERS
  • Slanted Reaction Ion Etching

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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