Integration of Germanium avalanche photodetectors on silicon for on-chip optical interconnects

Keyphrases

• Germanium 100%
• Avalanche Photodetector 100%
• On-chip Optical Interconnect 100%
• Capacitance 50%
• Single-crystalline 50%
• Sensitivity Enhancement 50%
• Bias Voltage 50%
• Monolithic Integration 50%
• Gain-bandwidth Product 50%
• Polycrystalline Ge 50%
• Keff 50%
• 40 Gbps 50%
• Waveguide Integrated 50%
• Rapid Melt Growth 50%
• Activation Annealing 50%
• Source/drain 50%
• Photodetector 50%
• Excess Noise 50%

Physics

• Photometer 100%
• Optical Interconnect 100%
• Avalanche 100%
• Waveguide 50%
• Melt Growth 50%