TY - GEN
T1 - Integration of an amorphous silicon passive pixel sensor array with a lateral amorphous selenium detector for large area indirect conversion x-ray imaging applications
AU - Wang, Kai
AU - Yazdandoost, Mohammad Y.
AU - Keshavarzi, Rasoul
AU - Shin, Kyung Wook
AU - Hristovski, Christos
AU - Abbaszadeh, Shiva
AU - Chen, Feng
AU - Majid, Shaikh Hasibul
AU - Karim, Karim S.
PY - 2011
Y1 - 2011
N2 - Previously, we reported on a single-pixel detector based on a lateral a-Se metal-semiconductor-metal structure, intended for indirect conversion X-ray imaging. This work is the continuous effort leading to the first prototype of an indirect conversion X-ray imaging sensor array utilizing lateral amorphous selenium. To replace a structurally-sophisticated vertical multilayer amorphous silicon photodiode, a lateral a-Se MSM photodetector is employed which can be easily integrated with an amorphous silicon thin film transistor passive pixel sensor array. In this work, both 2×2 macro-pixel and 32×32 micro-pixel arrays were fabricated and tested along with discussion of the results.
AB - Previously, we reported on a single-pixel detector based on a lateral a-Se metal-semiconductor-metal structure, intended for indirect conversion X-ray imaging. This work is the continuous effort leading to the first prototype of an indirect conversion X-ray imaging sensor array utilizing lateral amorphous selenium. To replace a structurally-sophisticated vertical multilayer amorphous silicon photodiode, a lateral a-Se MSM photodetector is employed which can be easily integrated with an amorphous silicon thin film transistor passive pixel sensor array. In this work, both 2×2 macro-pixel and 32×32 micro-pixel arrays were fabricated and tested along with discussion of the results.
KW - Amorphous selenium
KW - indirect conversion X-ray imaging
KW - lateral selenium
KW - passive pixel sensor
UR - http://www.scopus.com/inward/record.url?scp=79955753542&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=79955753542&partnerID=8YFLogxK
U2 - 10.1117/12.877592
DO - 10.1117/12.877592
M3 - Conference contribution
AN - SCOPUS:79955753542
SN - 9780819485038
T3 - Progress in Biomedical Optics and Imaging - Proceedings of SPIE
BT - Medical Imaging 2011
T2 - Medical Imaging 2011: Physics of Medical Imaging
Y2 - 13 February 2011 through 17 February 2011
ER -