Integration of an amorphous silicon passive pixel sensor array with a lateral amorphous selenium detector for large area indirect conversion x-ray imaging applications

Kai Wang, Mohammad Y. Yazdandoost, Rasoul Keshavarzi, Kyung Wook Shin, Christos Hristovski, Shiva Abbaszadeh, Feng Chen, Shaikh Hasibul Majid, Karim S. Karim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Previously, we reported on a single-pixel detector based on a lateral a-Se metal-semiconductor-metal structure, intended for indirect conversion X-ray imaging. This work is the continuous effort leading to the first prototype of an indirect conversion X-ray imaging sensor array utilizing lateral amorphous selenium. To replace a structurally-sophisticated vertical multilayer amorphous silicon photodiode, a lateral a-Se MSM photodetector is employed which can be easily integrated with an amorphous silicon thin film transistor passive pixel sensor array. In this work, both 2×2 macro-pixel and 32×32 micro-pixel arrays were fabricated and tested along with discussion of the results.

Original languageEnglish (US)
Title of host publicationMedical Imaging 2011
Subtitle of host publicationPhysics of Medical Imaging
DOIs
StatePublished - May 13 2011
EventMedical Imaging 2011: Physics of Medical Imaging - Lake Buena Vista, FL, United States
Duration: Feb 13 2011Feb 17 2011

Publication series

NameProgress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume7961
ISSN (Print)1605-7422

Other

OtherMedical Imaging 2011: Physics of Medical Imaging
CountryUnited States
CityLake Buena Vista, FL
Period2/13/112/17/11

Keywords

  • Amorphous selenium
  • indirect conversion X-ray imaging
  • lateral selenium
  • passive pixel sensor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Atomic and Molecular Physics, and Optics
  • Radiology Nuclear Medicine and imaging

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