Integrated NiSi waveguide heaters for CMOS-compatible silicon thermo-optic devices

Joris Van Campenhout, William M.J. Green, Solomon Assefa, Yurii A. Vlasov

Research output: Contribution to journalArticlepeer-review


We report the performance of NiSi-based heaters integrated with submicrometer silicon waveguides. The heaters were fabricated using a standard complementary metal-oxide-semiconductor (CMOS) silicidation process on a thin silicon slab laterally connected with a silicon rib waveguide. The intrinsic properties of such NiSi waveguide heaters were characterized by using them as thermo-optic phase shifters in a MachZehnder interferometer. The power consumption Pπ for obtaining a π phase shift was measured to be as low as 20 mW, using CMOS-compatible drive voltages. The time constant of the thermo-optic response was less than 2.8 μs. Simulations suggest that a further reduction in the power consumption Pπ is feasible.

Original languageEnglish (US)
Pages (from-to)1013-1015
Number of pages3
JournalOptics Letters
Issue number7
StatePublished - Apr 1 2010
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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