Abstract
An overview is given of a fabrication method and initial test results on a silicon nanowire sensor that is realized using top-down microelectronics processing techniques. The method allows for the realization of truly integrated dense array of sensors. Initial testing of the devices showed sensitivity towards oxygen ambient, suggesting the possibility of using these sensors for chemical and biological detection.
Original language | English (US) |
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Pages (from-to) | 4613-4615 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 83 |
Issue number | 22 |
DOIs | |
State | Published - Dec 1 2003 |
Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)