Integrated hydrophobic and hydrophilic substrate by nanopatterned surfaces

Hyunjong Jin, Austin Hsiaoy, Gang Logan Liu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Controlled integration of hydrophobic and hydrophilic surfaces has shown difficulty due to the challenges of post-treatment processing. In this paper, methods of systematic integration of hydrophobic and hydrophilic surfaces on the same sample are presented. Controlled fabrication of surfaces with different liquid contact angle is achieved. Surface hydrophobic properties have been altered with nanoscale surface patterning using cleanroom semiconductor fabrication techniques. Hydrophobic surfaces are achieved by fabrication of semi-ordered nanoporous surfaces with anodized aluminum oxide (AAO) followed by reactive ionic etching (RIE). Hydrophilic surfaces are made by using nanotexture surface film, made by proper conditions in CF4 RIE. Integration of these two techniques results in simple microfluidic channels from hydrophilic pathways surrounded by hydrophobic surfaces. The results from this paper will be applied for lab-on-chip applications, as efficient pathways for liquid transport.

Original languageEnglish (US)
Title of host publicationIEEE Sensors 2010 Conference, SENSORS 2010
Pages1364-1367
Number of pages4
DOIs
StatePublished - Dec 1 2010
Event9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
Duration: Nov 1 2010Nov 4 2010

Publication series

NameProceedings of IEEE Sensors

Other

Other9th IEEE Sensors Conference 2010, SENSORS 2010
CountryUnited States
CityWaikoloa, HI
Period11/1/1011/4/10

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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