Abstract
We present fabrication of silicon nitride integrated micro-optical elements on VCSELs using grayscale photolithography and dry etching. The optical characteristics of VCSELs with spirals are investigated.
| Original language | English (US) |
|---|---|
| Title of host publication | 2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings |
| Subtitle of host publication | Applications and Technology, CLEO:A and T 2021 |
| Publisher | The Optical Society |
| ISBN (Electronic) | 9781943580910 |
| DOIs | |
| State | Published - May 2021 |
| Event | 2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Virtual, Online, United States Duration: May 9 2021 → May 14 2021 |
Conference
| Conference | 2021 Conference on Lasers and Electro-Optics, CLEO 2021 |
|---|---|
| Country/Territory | United States |
| City | Virtual, Online |
| Period | 5/9/21 → 5/14/21 |
ASJC Scopus subject areas
- Computer Networks and Communications
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Atomic and Molecular Physics, and Optics
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