Integrated Dielectric Micro-Optical Elements on VCSELs Using Grayscale Photolithography

Raman Kumar, Katherine Lakomy, William North, Pawel Strzebonski, Kent D. Choquette

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present fabrication of silicon nitride integrated micro-optical elements on VCSELs using grayscale photolithography and dry etching. The optical characteristics of VCSELs with spirals are investigated.

Original languageEnglish (US)
Title of host publication2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781943580910
StatePublished - May 2021
Event2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Virtual, Online, United States
Duration: May 9 2021May 14 2021

Publication series

Name2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings

Conference

Conference2021 Conference on Lasers and Electro-Optics, CLEO 2021
Country/TerritoryUnited States
CityVirtual, Online
Period5/9/215/14/21

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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