@inproceedings{4192ed3ec30d4671ae6e20ab68837aa1,
title = "Integrated Dielectric Micro-Optical Elements on VCSELs Using Grayscale Photolithography",
abstract = "We present fabrication of silicon nitride integrated micro-optical elements on VCSELs using grayscale photolithography and dry etching. The optical characteristics of VCSELs with spirals are investigated.",
author = "Raman Kumar and Katherine Lakomy and William North and Pawel Strzebonski and Choquette, {Kent D.}",
note = "Publisher Copyright: {\textcopyright} 2021 OSA.; 2021 Conference on Lasers and Electro-Optics, CLEO 2021 ; Conference date: 09-05-2021 Through 14-05-2021",
year = "2021",
month = may,
language = "English (US)",
series = "2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings",
address = "United States",
}