Integrated dielectric micro-optical elements on VCSELs using grayscale photolithography

Raman Kumar, Katherine Lakomy, William North, Pawel Strzebonski, Kent D. Choquette

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present fabrication of silicon nitride integrated micro-optical elements on VCSELs using grayscale photolithography and dry etching. The optical characteristics of VCSELs with spirals are investigated.

Original languageEnglish (US)
Title of host publicationCLEO
Subtitle of host publicationApplications and Technology, CLEO:A and T 2021
PublisherThe Optical Society
ISBN (Electronic)9781557528209
StatePublished - 2021
EventCLEO: Applications and Technology, CLEO:A and T 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021 - Virtual, Online, United States
Duration: May 9 2021May 14 2021

Publication series

NameOptics InfoBase Conference Papers

Conference

ConferenceCLEO: Applications and Technology, CLEO:A and T 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021
Country/TerritoryUnited States
CityVirtual, Online
Period5/9/215/14/21

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

Fingerprint

Dive into the research topics of 'Integrated dielectric micro-optical elements on VCSELs using grayscale photolithography'. Together they form a unique fingerprint.

Cite this