@inproceedings{14397ac81eb04abe9fde5267075b4bb5,
title = "Integrated dielectric micro-optical elements on VCSELs using grayscale photolithography",
abstract = "We present fabrication of silicon nitride integrated micro-optical elements on VCSELs using grayscale photolithography and dry etching. The optical characteristics of VCSELs with spirals are investigated.",
author = "Raman Kumar and Katherine Lakomy and William North and Pawel Strzebonski and Choquette, {Kent D.}",
note = "Publisher Copyright: {\textcopyright} OSA 2021, {\textcopyright} 2021 The Author(s); CLEO: Applications and Technology, CLEO:A and T 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021 ; Conference date: 09-05-2021 Through 14-05-2021",
year = "2021",
language = "English (US)",
series = "Optics InfoBase Conference Papers",
publisher = "The Optical Society",
booktitle = "CLEO",
address = "United States",
}