Integrated cantilever-based biosensors for the detection of chemical and biological entities

Microcantilever sensors can be largely divided by the operation mode and the measurement environment. The operation mode of microcantilever sensors can be either the static mode based on the cantilever deflection or the dynamic mode based on the resonant frequency. The measurement environment often determines the type of sample entities and limits the sensitivity of the microcantilever sensor. The measurement environment can be in vacuum, in air, or in liquid. In this chapter, the microcantilever sensors in each category will be reviewed and one exemplary work will be discussed in further detail.