Injection system based on silicon oxide microneedles

E. Valera; D. Molinero; A. Rodríguez; T. Trifonov; L. Marsal; J. Pallarès; R. Alcubilla

doi:10.1109/SCED.2005.1504487

Injection system based on silicon oxide microneedles

E. Valera, D. Molinero, A. Rodríguez, T. Trifonov, L. Marsal, J. Pallarès, R. Alcubilla

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This work presents a novel injection system based on silicon oxide microneedles. Microneedles fabricated in this work are hollow microcapillaries whose length ranges from tens to hundreds of microns and their tip diameter is in the range of micrometers. Structures based on microneedles are of increasing interest in medical and biological applications, specially for injection and manipulation. Fabrication process of the microneedles is based on electrochemical etching of n-type silicon in hydrofluoric acid (HF) solution. Combining porous silicon technology with traditional micromachining technology, an injection system can be obtained. The fabrication steps both of macroporous silicon and the injection system are described.

Original language	English (US)
Title of host publication	2005 Spanish Conference on Electron Devices, Proceedings
Pages	477-479
Number of pages	3
DOIs	https://doi.org/10.1109/SCED.2005.1504487
State	Published - 2005
Externally published	Yes
Event	2005 Spanish Conference on Electron Devices - Tarragona, Spain Duration: Feb 2 2005 → Feb 4 2005

Publication series

Name	2005 Spanish Conference on Electron Devices, Proceedings
Volume	2005

Conference

Conference	2005 Spanish Conference on Electron Devices
Country/Territory	Spain
City	Tarragona
Period	2/2/05 → 2/4/05

ASJC Scopus subject areas

General Engineering

Online availability

10.1109/SCED.2005.1504487

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Valera, E, Molinero, D, Rodríguez, A, Trifonov, T, Marsal, L, Pallarès, J & Alcubilla, R 2005, Injection system based on silicon oxide microneedles. in 2005 Spanish Conference on Electron Devices, Proceedings., 1504487, 2005 Spanish Conference on Electron Devices, Proceedings, vol. 2005, pp. 477-479, 2005 Spanish Conference on Electron Devices, Tarragona, Spain, 2/2/05. https://doi.org/10.1109/SCED.2005.1504487

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abstract = "This work presents a novel injection system based on silicon oxide microneedles. Microneedles fabricated in this work are hollow microcapillaries whose length ranges from tens to hundreds of microns and their tip diameter is in the range of micrometers. Structures based on microneedles are of increasing interest in medical and biological applications, specially for injection and manipulation. Fabrication process of the microneedles is based on electrochemical etching of n-type silicon in hydrofluoric acid (HF) solution. Combining porous silicon technology with traditional micromachining technology, an injection system can be obtained. The fabrication steps both of macroporous silicon and the injection system are described.",

author = "E. Valera and D. Molinero and A. Rodr{\'i}guez and T. Trifonov and L. Marsal and J. Pallar{\`e}s and R. Alcubilla",

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doi = "10.1109/SCED.2005.1504487",

language = "English (US)",

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AU - Valera, E.

AU - Molinero, D.

AU - Rodríguez, A.

AU - Trifonov, T.

AU - Marsal, L.

AU - Pallarès, J.

AU - Alcubilla, R.

PY - 2005

Y1 - 2005

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AB - This work presents a novel injection system based on silicon oxide microneedles. Microneedles fabricated in this work are hollow microcapillaries whose length ranges from tens to hundreds of microns and their tip diameter is in the range of micrometers. Structures based on microneedles are of increasing interest in medical and biological applications, specially for injection and manipulation. Fabrication process of the microneedles is based on electrochemical etching of n-type silicon in hydrofluoric acid (HF) solution. Combining porous silicon technology with traditional micromachining technology, an injection system can be obtained. The fabrication steps both of macroporous silicon and the injection system are described.

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ER -

Injection system based on silicon oxide microneedles

Abstract

Publication series

Conference

ASJC Scopus subject areas

Online availability

Library availability

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