InGaAsP-InP ridge-waveguide DBR lasers with first-order surface gratings fabricated using CAIBE

R. M. Lammert; A. M. Jones; C. T. Youtsey; J. S. Hughes; S. D. Roh; I. Adesida; J. J. Coleman

InGaAsP-InP ridge-waveguide DBR lasers with first-order surface gratings fabricated using CAIBE

R. M. Lammert, A. M. Jones, C. T. Youtsey, J. S. Hughes, S. D. Roh, I. Adesida, J. J. Coleman

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Abstract

Generally, the fabrication of distributed Bragg reflector (DBR) and distributed feedback (DFB) lasers requires regrowth over a grating. While fabricating the devices, special measures must be taken to preserve the grating during the regrowth. Moreover, surface preparation techniques are needed to remove grating fabrication contamination before regrowth. Utilizing surface gratings to fabricate DBR lasers solves the problem of regrowth. This is demonstrated by the formation of first-order DBR gratings on a 0.74 μm-thick upper cladding structure by chemically-assisted ion beam etching and electron-beam lithography.

Original language	English (US)
Pages (from-to)	278-279
Number of pages	2
Journal	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume	1
State	Published - 1997
Event	Proceedings of the 1997 10th IEEE Lasers and Electro-Optics Society Annual Meeting, LEOS. Part 2 (of 2) - San Francisco, CA, USA Duration: Nov 10 1997 → Nov 13 1997

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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title = "InGaAsP-InP ridge-waveguide DBR lasers with first-order surface gratings fabricated using CAIBE",

abstract = "Generally, the fabrication of distributed Bragg reflector (DBR) and distributed feedback (DFB) lasers requires regrowth over a grating. While fabricating the devices, special measures must be taken to preserve the grating during the regrowth. Moreover, surface preparation techniques are needed to remove grating fabrication contamination before regrowth. Utilizing surface gratings to fabricate DBR lasers solves the problem of regrowth. This is demonstrated by the formation of first-order DBR gratings on a 0.74 μm-thick upper cladding structure by chemically-assisted ion beam etching and electron-beam lithography.",

author = "Lammert, {R. M.} and Jones, {A. M.} and Youtsey, {C. T.} and Hughes, {J. S.} and Roh, {S. D.} and I. Adesida and Coleman, {J. J.}",

year = "1997",

language = "English (US)",

volume = "1",

pages = "278--279",

journal = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",

issn = "1092-8081",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "Proceedings of the 1997 10th IEEE Lasers and Electro-Optics Society Annual Meeting, LEOS. Part 2 (of 2) ; Conference date: 10-11-1997 Through 13-11-1997",

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TY - JOUR

T1 - InGaAsP-InP ridge-waveguide DBR lasers with first-order surface gratings fabricated using CAIBE

AU - Lammert, R. M.

AU - Jones, A. M.

AU - Youtsey, C. T.

AU - Hughes, J. S.

AU - Roh, S. D.

AU - Adesida, I.

AU - Coleman, J. J.

PY - 1997

Y1 - 1997

N2 - Generally, the fabrication of distributed Bragg reflector (DBR) and distributed feedback (DFB) lasers requires regrowth over a grating. While fabricating the devices, special measures must be taken to preserve the grating during the regrowth. Moreover, surface preparation techniques are needed to remove grating fabrication contamination before regrowth. Utilizing surface gratings to fabricate DBR lasers solves the problem of regrowth. This is demonstrated by the formation of first-order DBR gratings on a 0.74 μm-thick upper cladding structure by chemically-assisted ion beam etching and electron-beam lithography.

AB - Generally, the fabrication of distributed Bragg reflector (DBR) and distributed feedback (DFB) lasers requires regrowth over a grating. While fabricating the devices, special measures must be taken to preserve the grating during the regrowth. Moreover, surface preparation techniques are needed to remove grating fabrication contamination before regrowth. Utilizing surface gratings to fabricate DBR lasers solves the problem of regrowth. This is demonstrated by the formation of first-order DBR gratings on a 0.74 μm-thick upper cladding structure by chemically-assisted ion beam etching and electron-beam lithography.

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M3 - Conference article

AN - SCOPUS:0031381877

SN - 1092-8081

VL - 1

SP - 278

EP - 279

JO - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

JF - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

T2 - Proceedings of the 1997 10th IEEE Lasers and Electro-Optics Society Annual Meeting, LEOS. Part 2 (of 2)

Y2 - 10 November 1997 through 13 November 1997

ER -

InGaAsP-InP ridge-waveguide DBR lasers with first-order surface gratings fabricated using CAIBE

Abstract

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