Infrared relfectance spectroscopy of very thin films of a-SiH

N. Maley, I. Szafranek, L. Mandrell, M. Katiyar, J. R. Abelson, J. A. Thornton

Research output: Contribution to journalArticlepeer-review


We demonstrate the ability of infrared reflectance spectroscopy to monitor the nature of SiH bonding in a-SiH films only ∼10Å thick. Measurements on reactive dc magnetron sputtered samples clearly show a SiH stretching mode at 2100cm-1 in the thinnest films. The results also show systematic variations with film thickness and the hydrogen partial pressure during deposition. A simple model is presented to explain the observed results.

Original languageEnglish (US)
Pages (from-to)163-165
Number of pages3
JournalJournal of Non-Crystalline Solids
Issue numberPART 1
StatePublished - Dec 1 1989

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Materials Chemistry


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