Influence of the temperature dependent A-F effect on the design and performance of MEMS oscillators

Hyung Kyu Lee, James Salvia, Gaurav Bahl, Renata Melamud, Shingo Yoneoka, Yu Qiao Qu, Saurabh Chandorkar, Matthew A. Hopcroft, Bongsang Kim, Thomas W. Kenny

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this work, we develop a theoretical explanation for the temperature dependence of the nonlinear amplitude-frequency (A-f) effect in micromechanical resonators. Using this theory, we explain the discrepancy in frequency-temperature (f-T) characteristics between open-loop observation and closed-loop measurements. We show how the temperature dependence of the A-f effect introduces bias voltage dependence in the f-T characteristics of an oscillator system. Based upon this understanding, we present a new method to remove the temperature dependence of the A-f effect from an oscillator system, thereby eliminating the bias voltage (Vbias) dependency, and enabling predictable f-T characteristics.

Original languageEnglish (US)
Title of host publicationMEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages699-702
Number of pages4
DOIs
StatePublished - Jun 1 2010
Externally publishedYes
Event23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China
Duration: Jan 24 2010Jan 28 2010

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
CountryChina
CityHong Kong
Period1/24/101/28/10

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Influence of the temperature dependent A-F effect on the design and performance of MEMS oscillators'. Together they form a unique fingerprint.

Cite this