TY - GEN
T1 - Influence of the temperature dependent A-F effect on the design and performance of MEMS oscillators
AU - Lee, Hyung Kyu
AU - Salvia, James
AU - Bahl, Gaurav
AU - Melamud, Renata
AU - Yoneoka, Shingo
AU - Qu, Yu Qiao
AU - Chandorkar, Saurabh
AU - Hopcroft, Matthew A.
AU - Kim, Bongsang
AU - Kenny, Thomas W.
PY - 2010
Y1 - 2010
N2 - In this work, we develop a theoretical explanation for the temperature dependence of the nonlinear amplitude-frequency (A-f) effect in micromechanical resonators. Using this theory, we explain the discrepancy in frequency-temperature (f-T) characteristics between open-loop observation and closed-loop measurements. We show how the temperature dependence of the A-f effect introduces bias voltage dependence in the f-T characteristics of an oscillator system. Based upon this understanding, we present a new method to remove the temperature dependence of the A-f effect from an oscillator system, thereby eliminating the bias voltage (Vbias) dependency, and enabling predictable f-T characteristics.
AB - In this work, we develop a theoretical explanation for the temperature dependence of the nonlinear amplitude-frequency (A-f) effect in micromechanical resonators. Using this theory, we explain the discrepancy in frequency-temperature (f-T) characteristics between open-loop observation and closed-loop measurements. We show how the temperature dependence of the A-f effect introduces bias voltage dependence in the f-T characteristics of an oscillator system. Based upon this understanding, we present a new method to remove the temperature dependence of the A-f effect from an oscillator system, thereby eliminating the bias voltage (Vbias) dependency, and enabling predictable f-T characteristics.
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U2 - 10.1109/MEMSYS.2010.5442312
DO - 10.1109/MEMSYS.2010.5442312
M3 - Conference contribution
AN - SCOPUS:77952761952
SN - 9781424457649
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 699
EP - 702
BT - MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Y2 - 24 January 2010 through 28 January 2010
ER -