Abstract
As a high density and precision energy source, laser has been a powerful tool in microscale material processing, such as micro channel fabrication, micro hole drilling, micro milling of 3D structures, 3D micro deposition, etc. This paper reviews how to achieve the desired spatial resolutions, highlights some of the emerging industrial applications of laser micro/nano material processing, followed by the discussion of practical challenges.
| Original language | English (US) |
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| DOIs | |
| State | Published - 2006 |
| Externally published | Yes |
| Event | ICALEO 2006 - 25th International Congress on Applications of Laser and Electro-Optics - Scottsdale, AZ, United States Duration: Oct 30 2006 → Nov 2 2006 |
Other
| Other | ICALEO 2006 - 25th International Congress on Applications of Laser and Electro-Optics |
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| Country/Territory | United States |
| City | Scottsdale, AZ |
| Period | 10/30/06 → 11/2/06 |
ASJC Scopus subject areas
- Geochemistry and Petrology
- Electrical and Electronic Engineering