Increased medium-range order in amorphous silicon with increased substrate temperature

P. M. Voyles; J. E. Gerbi; M. M.J. Treacy; J. M. Gibson; J. R. Abelson

doi:10.1016/S0022-3093(01)00652-4

Increased medium-range order in amorphous silicon with increased substrate temperature

P. M. Voyles, J. E. Gerbi, M. M.J. Treacy, J. M. Gibson, J. R. Abelson

Research output: Contribution to journal › Conference article › peer-review

Abstract

Using fluctuation electron microscopy, we have measured the medium-range order of magnetron sputtered silicon thin films as a function of substrate temperature from the amorphous to polycrystalline regimes. We find a smooth increase in the medium-range order of the samples, which we interpret in the context of the paracrystalline structural model as an increase in the size of and/or volume fraction occupied by the paracrystalline grains. These data are counter to the long-standing belief that there is a sharp transition between amorphous and polycrystalline structures as a function of substrate temperature.

Original language	English (US)
Pages (from-to)	45-52
Number of pages	8
Journal	Journal of Non-Crystalline Solids
Volume	293-295
Issue number	1
DOIs	https://doi.org/10.1016/S0022-3093(01)00652-4
State	Published - Nov 2001
Event	8th International Conference on Non-Cristalline Materials (NCM-8) - Aberystwyth, United Kingdom Duration: Aug 6 2000 → Aug 11 2000

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Condensed Matter Physics
Materials Chemistry

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10.1016/S0022-3093(01)00652-4

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title = "Increased medium-range order in amorphous silicon with increased substrate temperature",

abstract = "Using fluctuation electron microscopy, we have measured the medium-range order of magnetron sputtered silicon thin films as a function of substrate temperature from the amorphous to polycrystalline regimes. We find a smooth increase in the medium-range order of the samples, which we interpret in the context of the paracrystalline structural model as an increase in the size of and/or volume fraction occupied by the paracrystalline grains. These data are counter to the long-standing belief that there is a sharp transition between amorphous and polycrystalline structures as a function of substrate temperature.",

author = "Voyles, \{P. M.\} and Gerbi, \{J. E.\} and Treacy, \{M. M.J.\} and Gibson, \{J. M.\} and Abelson, \{J. R.\}",

note = "We thank Peggy Bisher for technical assistance. P.M.V. acknowledges the support of the National Science Foundation under grant DMR 97-03906. J.E.G. and J.R.A. acknowledge the support of the National Renewable Energy Laboratory under subcontract ADD-9-18668.; 8th International Conference on Non-Cristalline Materials (NCM-8) ; Conference date: 06-08-2000 Through 11-08-2000",

year = "2001",

month = nov,

doi = "10.1016/S0022-3093(01)00652-4",

language = "English (US)",

volume = "293-295",

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journal = "Journal of Non-Crystalline Solids",

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TY - JOUR

T1 - Increased medium-range order in amorphous silicon with increased substrate temperature

AU - Voyles, P. M.

AU - Gerbi, J. E.

AU - Treacy, M. M.J.

AU - Gibson, J. M.

AU - Abelson, J. R.

N1 - We thank Peggy Bisher for technical assistance. P.M.V. acknowledges the support of the National Science Foundation under grant DMR 97-03906. J.E.G. and J.R.A. acknowledge the support of the National Renewable Energy Laboratory under subcontract ADD-9-18668.

PY - 2001/11

Y1 - 2001/11

N2 - Using fluctuation electron microscopy, we have measured the medium-range order of magnetron sputtered silicon thin films as a function of substrate temperature from the amorphous to polycrystalline regimes. We find a smooth increase in the medium-range order of the samples, which we interpret in the context of the paracrystalline structural model as an increase in the size of and/or volume fraction occupied by the paracrystalline grains. These data are counter to the long-standing belief that there is a sharp transition between amorphous and polycrystalline structures as a function of substrate temperature.

AB - Using fluctuation electron microscopy, we have measured the medium-range order of magnetron sputtered silicon thin films as a function of substrate temperature from the amorphous to polycrystalline regimes. We find a smooth increase in the medium-range order of the samples, which we interpret in the context of the paracrystalline structural model as an increase in the size of and/or volume fraction occupied by the paracrystalline grains. These data are counter to the long-standing belief that there is a sharp transition between amorphous and polycrystalline structures as a function of substrate temperature.

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U2 - 10.1016/S0022-3093(01)00652-4

DO - 10.1016/S0022-3093(01)00652-4

M3 - Conference article

AN - SCOPUS:0035500714

SN - 0022-3093

VL - 293-295

SP - 45

EP - 52

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

IS - 1

T2 - 8th International Conference on Non-Cristalline Materials (NCM-8)

Y2 - 6 August 2000 through 11 August 2000

ER -

Increased medium-range order in amorphous silicon with increased substrate temperature

Abstract

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