Increased medium-range order in amorphous silicon with increased substrate temperature

P. M. Voyles; J. E. Gerbi; M. M.J. Treacy; J. M. Gibson; J. R. Abelson

doi:10.1016/S0022-3093(01)00652-4

Increased medium-range order in amorphous silicon with increased substrate temperature

P. M. Voyles, J. E. Gerbi, M. M.J. Treacy, J. M. Gibson, J. R. Abelson

Research output: Contribution to journal › Conference article › peer-review

Abstract

Using fluctuation electron microscopy, we have measured the medium-range order of magnetron sputtered silicon thin films as a function of substrate temperature from the amorphous to polycrystalline regimes. We find a smooth increase in the medium-range order of the samples, which we interpret in the context of the paracrystalline structural model as an increase in the size of and/or volume fraction occupied by the paracrystalline grains. These data are counter to the long-standing belief that there is a sharp transition between amorphous and polycrystalline structures as a function of substrate temperature.

Original language	English (US)
Pages (from-to)	45-52
Number of pages	8
Journal	Journal of Non-Crystalline Solids
Volume	293-295
Issue number	1
DOIs	https://doi.org/10.1016/S0022-3093(01)00652-4
State	Published - Nov 2001
Event	8th International Conference on Non-Cristalline Materials (NCM-8) - Aberystwyth, United Kingdom Duration: Aug 6 2000 → Aug 11 2000

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Condensed Matter Physics
Materials Chemistry

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10.1016/S0022-3093(01)00652-4

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@article{580876acbf314653bb498b1c9b456eb1,

title = "Increased medium-range order in amorphous silicon with increased substrate temperature",

abstract = "Using fluctuation electron microscopy, we have measured the medium-range order of magnetron sputtered silicon thin films as a function of substrate temperature from the amorphous to polycrystalline regimes. We find a smooth increase in the medium-range order of the samples, which we interpret in the context of the paracrystalline structural model as an increase in the size of and/or volume fraction occupied by the paracrystalline grains. These data are counter to the long-standing belief that there is a sharp transition between amorphous and polycrystalline structures as a function of substrate temperature.",

author = "Voyles, {P. M.} and Gerbi, {J. E.} and Treacy, {M. M.J.} and Gibson, {J. M.} and Abelson, {J. R.}",

note = "Funding Information: We thank Peggy Bisher for technical assistance. P.M.V. acknowledges the support of the National Science Foundation under grant DMR 97-03906. J.E.G. and J.R.A. acknowledge the support of the National Renewable Energy Laboratory under subcontract ADD-9-18668. ; 8th International Conference on Non-Cristalline Materials (NCM-8) ; Conference date: 06-08-2000 Through 11-08-2000",

year = "2001",

month = nov,

doi = "10.1016/S0022-3093(01)00652-4",

language = "English (US)",

volume = "293-295",

pages = "45--52",

journal = "Journal of Non-Crystalline Solids",

issn = "0022-3093",

publisher = "Elsevier B.V.",

number = "1",

}

TY - JOUR

T1 - Increased medium-range order in amorphous silicon with increased substrate temperature

AU - Voyles, P. M.

AU - Gerbi, J. E.

AU - Treacy, M. M.J.

AU - Gibson, J. M.

AU - Abelson, J. R.

N1 - Funding Information: We thank Peggy Bisher for technical assistance. P.M.V. acknowledges the support of the National Science Foundation under grant DMR 97-03906. J.E.G. and J.R.A. acknowledge the support of the National Renewable Energy Laboratory under subcontract ADD-9-18668.

PY - 2001/11

Y1 - 2001/11

N2 - Using fluctuation electron microscopy, we have measured the medium-range order of magnetron sputtered silicon thin films as a function of substrate temperature from the amorphous to polycrystalline regimes. We find a smooth increase in the medium-range order of the samples, which we interpret in the context of the paracrystalline structural model as an increase in the size of and/or volume fraction occupied by the paracrystalline grains. These data are counter to the long-standing belief that there is a sharp transition between amorphous and polycrystalline structures as a function of substrate temperature.

AB - Using fluctuation electron microscopy, we have measured the medium-range order of magnetron sputtered silicon thin films as a function of substrate temperature from the amorphous to polycrystalline regimes. We find a smooth increase in the medium-range order of the samples, which we interpret in the context of the paracrystalline structural model as an increase in the size of and/or volume fraction occupied by the paracrystalline grains. These data are counter to the long-standing belief that there is a sharp transition between amorphous and polycrystalline structures as a function of substrate temperature.

UR - http://www.scopus.com/inward/record.url?scp=0035500714&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035500714&partnerID=8YFLogxK

U2 - 10.1016/S0022-3093(01)00652-4

DO - 10.1016/S0022-3093(01)00652-4

M3 - Conference article

AN - SCOPUS:0035500714

SN - 0022-3093

VL - 293-295

SP - 45

EP - 52

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

IS - 1

T2 - 8th International Conference on Non-Cristalline Materials (NCM-8)

Y2 - 6 August 2000 through 11 August 2000

ER -

Increased medium-range order in amorphous silicon with increased substrate temperature

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