Abstract
Using fluctuation electron microscopy, we have measured the medium-range order of magnetron sputtered silicon thin films as a function of substrate temperature from the amorphous to polycrystalline regimes. We find a smooth increase in the medium-range order of the samples, which we interpret in the context of the paracrystalline structural model as an increase in the size of and/or volume fraction occupied by the paracrystalline grains. These data are counter to the long-standing belief that there is a sharp transition between amorphous and polycrystalline structures as a function of substrate temperature.
Original language | English (US) |
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Pages (from-to) | 45-52 |
Number of pages | 8 |
Journal | Journal of Non-Crystalline Solids |
Volume | 293-295 |
Issue number | 1 |
DOIs | |
State | Published - Nov 2001 |
Event | 8th International Conference on Non-Cristalline Materials (NCM-8) - Aberystwyth, United Kingdom Duration: Aug 6 2000 → Aug 11 2000 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- Condensed Matter Physics
- Materials Chemistry