In situ thermomechanical testing for micro/nanomaterials

Wonmo Kang, M Taher A Saif

Research output: Contribution to journalArticle

Abstract

A novel method for the in situ thermomechanical test of micro/nanoscale samples at high temperature is presented. During the in situ test, the stage is resistively heated while the temperature is measured by a cofabricated temperature sensor. For experimental demonstration of the thermomechanical testing method, we fabricate the Micro-Electro-Mechanical Systems (MEMS) stage using silicon carbide (SiC) and carry out in situ uniaxial tests for single-crystal silicon (SCS) microsamples at temperatures from room temperature to 400 °C. We recover the known elastic modulus of SCS within 1% error in this temperature range.

Original languageEnglish (US)
Pages (from-to)13-16
Number of pages4
JournalMRS Communications
Volume1
Issue number1
DOIs
StatePublished - Nov 2011

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Nanostructured materials
Testing
Silicon
Temperature
Single crystals
Temperature sensors
Silicon carbide
Demonstrations
Elastic moduli

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

In situ thermomechanical testing for micro/nanomaterials. / Kang, Wonmo; Saif, M Taher A.

In: MRS Communications, Vol. 1, No. 1, 11.2011, p. 13-16.

Research output: Contribution to journalArticle

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