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In-situ tensile testing of nano-scale specimens in SEM and TEM
M. A. Haque,
M. T.A. Saif
Mechanical Science and Engineering
Bioengineering
Beckman Institute for Advanced Science and Technology
Carl R. Woese Institute for Genomic Biology
Biomedical and Translational Sciences
Center for South Asian and Middle Eastern Studies
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Keyphrases
Elastic Modulus
100%
In Situ
100%
Silicon Substrate
100%
Proposed Methodology
100%
Uniaxial Tension
100%
Force Sensor
100%
Environmental Conditions
100%
Humidity
100%
Lithography
100%
Sputter-deposited
100%
Yield Stress
100%
Mechanical Characterization
100%
Linear Elastic
100%
Tensile Test
100%
Elastic Regime
100%
Nanometre
100%
Free-standing Film
100%
Material Response
100%
In Situ TEM
100%
Metal-dielectric
100%
Bulk Micromachining
100%
In-situ SEM
100%
Micromachining Technique
100%
Stress-strain Diagram
100%
Multilayer Composite
100%
Environmental SEM
100%
In-situ Tensile Test
100%
Co-fabrication
100%
Engineering
Nanoscale
100%
Tensile Testing
100%
Thin Films
50%
Nanometre
50%
Silicon Substrate
50%
Dielectrics
50%
Lithography
50%
Micro Machining
50%
Elastic Regime
50%
Material Response
50%
Stress Strain Diagram
50%
Modulus of Elasticity
50%
Yield Point
50%
Material Science
Scanning Electron Microscopy
100%
Tensile Testing
100%
Yield Stress
25%
Silicon
25%
Thin Films
25%
Elastic Moduli
25%
Lithography
25%
Aluminum
25%
Multilayer
25%
Mechanical Testing
25%
Micromachining
25%
Composite Material
25%
Dielectric Material
25%