In-situ process for AlGaAs compound semiconductor: Materials science and device fabrication

Engineering & Materials Science

• Molecular beam epitaxy 100%
• Materials science 79%
• Semiconductor materials 57%
• III-V semiconductors 53%
• Ultrahigh vacuum 50%
• Surface emitting lasers 45%
• Semiconductor lasers 40%
• Semiconductor devices 37%
• Impurities 31%
• Plasmas 29%
• Oxides 27%

Physics & Astronomy

• materials science 70%
• aluminum gallium arsenides 60%
• molecular beam epitaxy 54%
• fabrication 39%
• electron cyclotron resonance 35%
• surface emitting lasers 34%
• contaminants 33%
• semiconductor devices 32%
• ultrahigh vacuum 32%
• semiconductor lasers 24%
• etching 24%
• oxides 20%
• cavities 19%
• air 19%
• performance 14%

Chemical Compounds

• Molecular Beam Epitaxy 61%
• Electron Cyclotron Resonance 33%
• Surface 20%
• Etching 19%
• Vacuum 17%
• Plasma 13%
• Environment 12%
• Oxide 11%