In-situ mechanical characterization of a freestanding 100 nanometer thick aluminum film in SEM using MEMS sensors

Keyphrases

• In Situ 100%
• Mechanical Characterization 100%
• Aluminum Film 100%
• Nanometre 100%
• MEMS Sensor 100%
• Size Scaling 66%
• Elastic Modulus 33%
• Grain Size 33%
• Axial Stress 33%
• In-situ Test 33%
• Stress-strain Response 33%
• Mechanism-based 33%
• Dislocation Mechanisms 33%
• MEMS Force Sensor 33%
• Strain Hardening Effect 33%
• Displacement Sensor 33%

Material Science

• Microelectromechanical System 100%
• Scanning Electron Microscopy 100%
• Film 100%
• Aluminum 100%
• Mechanical Testing 100%
• Elastic Moduli 33%
• Grain Size 33%
• Stress-Strain Relations 33%
• Work Hardening 33%
• Dislocation Mechanism 33%

Engineering

• Microelectromechanical System 100%
• Nanometre 100%
• Aluminum Film 100%
• Size Scale 66%
• Experimental Result 33%
• Stress-Strain Relations 33%
• Hardening Effect 33%
• Displacement Sensor 33%
• Situ Test 33%
• Dislocation Mechanism 33%
• Modulus of Elasticity 33%
• Strain Hardening 33%