In-situ mechanical characterization of a freestanding 100 nanometer thick aluminum film in SEM using MEMS sensors

Aman Haque, M Taher A Saif

Research output: Contribution to journalConference article

Abstract

We present the uniaxial stress-strain response of a freestanding 100 nanometer thick 99.99% pure sputtered Aluminum film with grain size about 60 nanometers, tested in-situ inside a SEM chamber. The specimen is cofabricated with MEMS force and displacement sensors to minimize the experimental setup size, allowing both quantitative and in-situ tests to be performed in SEM and TEM chambers. The experimental results strongly suggest that at this size scale, a) Elastic modulus remains same as the bulk Aluminum, b) Yielding starts at about 625 MPa, and c) Strain hardening effect is absent, which indirectly suggests the deformation at this size scale is not dislocation mechanism based.

Original languageEnglish (US)
Pages (from-to)361-364
Number of pages4
JournalMaterials Research Society Symposium - Proceedings
Volume695
StatePublished - Jan 1 2002
EventThin Films: Stresses and Mechanical Properties IX - Boston, MA, United States
Duration: Nov 26 2001Nov 30 2001

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Aluminum
microelectromechanical systems
MEMS
aluminum
Scanning electron microscopy
scanning electron microscopy
sensors
Sensors
chambers
Strain hardening
strain hardening
Elastic moduli
Transmission electron microscopy
modulus of elasticity
grain size
transmission electron microscopy

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

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N2 - We present the uniaxial stress-strain response of a freestanding 100 nanometer thick 99.99% pure sputtered Aluminum film with grain size about 60 nanometers, tested in-situ inside a SEM chamber. The specimen is cofabricated with MEMS force and displacement sensors to minimize the experimental setup size, allowing both quantitative and in-situ tests to be performed in SEM and TEM chambers. The experimental results strongly suggest that at this size scale, a) Elastic modulus remains same as the bulk Aluminum, b) Yielding starts at about 625 MPa, and c) Strain hardening effect is absent, which indirectly suggests the deformation at this size scale is not dislocation mechanism based.

AB - We present the uniaxial stress-strain response of a freestanding 100 nanometer thick 99.99% pure sputtered Aluminum film with grain size about 60 nanometers, tested in-situ inside a SEM chamber. The specimen is cofabricated with MEMS force and displacement sensors to minimize the experimental setup size, allowing both quantitative and in-situ tests to be performed in SEM and TEM chambers. The experimental results strongly suggest that at this size scale, a) Elastic modulus remains same as the bulk Aluminum, b) Yielding starts at about 625 MPa, and c) Strain hardening effect is absent, which indirectly suggests the deformation at this size scale is not dislocation mechanism based.

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