@inproceedings{a347779bc46a46b5bd6ceba6ef01acd8,
title = "In-situ fabrication of {111} mirror and optical bench using double-sided anisotropic wet etching of {100} silicon wafer",
abstract = "This work presents a novel fabrication method for {111} dual mirror and optical bench using double-sided anisotropic wet etching of 100> oriented silicon wafer. The roughness of the wet etched {111} plane is 8 nm.",
keywords = "100> oriented silicon, double-sided anisotropic wet etching, optical bench, {111} mirror",
author = "Kim, {Jung Mu} and Hyunseok Kim and Sunghyun Yoo and Lee, {Kook Nyung} and Kim, {Yong Kweon}",
year = "2012",
doi = "10.1109/OMEMS.2012.6318834",
language = "English (US)",
isbn = "9781457715112",
series = "International Conference on Optical MEMS and Nanophotonics",
pages = "125--126",
booktitle = "2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012",
note = "2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 ; Conference date: 06-08-2012 Through 09-08-2012",
}