In-situ ellipsometry study of ion bombardment effects on low temperature Si epitaxy by dc magnetron sputtering

Y. H. Yang, G. F. Feng, M. Katiyar, John R Abelson

Research output: Contribution to journalConference articlepeer-review


We deposit Si films on Si(100) substrates at temperatures of 300 - 350°C using dc magnetron sputtering, and characterize the structure by in-situ spectroscopic ellipsometry. Changes in the ion or electron bombardment, produced by biasing the sample with respect to the floating potential, are found to exert a strong effect on the kinetics of the crystalline (epitaxial) to amorphous transition for films deposited just below the apparent minimum temperature (350°C) for sustained epitaxy. At 320°C, the best results are found at the floating potential, which is 25 V below the plasma potential and produces an ion flux equal to the depositing Si flux on the substrate. At +14 V above the floating potential, the volume fraction of crystalline Si decreases exponentially with thickness, and the characteristic decay length is a function of substrate temperature. At -14 V below the floating potential, the deposited film is amorphous with a large void content. These observations demonstrate the subtle tradeoff between enhanced surface mobility and defect creation by low energy ion bombardment.

Original languageEnglish (US)
Pages (from-to)75-80
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
StatePublished - Dec 1 1995
EventProceedings of the 1994 MRS Fall Meeting - Boston, MA, USA
Duration: Nov 28 1994Dec 2 1994

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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