Impurity induced disordered quantum well heterostructure stripe geometry lasers by MeV oxygen implantation

R. P. Bryan, J. J. Coleman, L. M. Miller, M. E. Givens, R. S. Averback, J. L. Klatt

Research output: Contribution to journalArticlepeer-review

Abstract

Data are presented on stripe geometry AlGaAs-GaAs graded barrier quantum well heterostructure lasers formed by MeV oxygen implantation and annealing. Low-dose implants are found to suppress lateral carrier diffusion but do not result in compositional disordering. High-dose implants form both a semi-insulating and a compositionally disordered region leading to index-guided buried-heterostructure laser operation. However, the concentration of oxygen which spreads laterally under the implantation mask during high-dose implants is sufficient to partially compensate the stripe region for narrow stripe widths and thereby significantly increases the threshold current.

Original languageEnglish (US)
Pages (from-to)94-96
Number of pages3
JournalApplied Physics Letters
Volume55
Issue number2
DOIs
StatePublished - 1989

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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