Improved surface chemistries, thin film deposition techniques, and stamp designs for nanotransfer printing

Etienne Menard, Lise Bilhaut, Jana Zaumseil, John A. Rogers

Research output: Contribution to journalArticlepeer-review

Abstract

Nanotransfer printing represents an additive approach for patterning thin layers of solid materials with nanometer resolution. The surface chemistries, thin film deposition techniques, and stamp designs are all important for the proper operation of this method. This paper presents some details concerning processing procedures and other considerations needed for patterning two- and three-dimensional nanostructures with low density of defects and minimal distortions.

Original languageEnglish (US)
Pages (from-to)6871-6878
Number of pages8
JournalLangmuir
Volume20
Issue number16
DOIs
StatePublished - Aug 3 2004

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Spectroscopy
  • Electrochemistry

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