Improved modeling of non-continuum heat transfer during topographical imaging with a heated Atomic Force Microscope cantilever

Nathan D. Masters, Wenjing Ye, William P. King

Research output: Contribution to journalConference article

Abstract

Thermal Sensing Atomic Force Microscopy (TSAFM) is a promising new technology for topographical imaging and high density data storage that uses the heat transfer between a heated cantilever and the scanned surface as the sensing mechanism. Due to the small operational scan heights (< 300 nm), continuum gas phase heat transfer models (as used in previous studies) cannot accurately describe the actual behavior - affecting the accuracy of data interpretation and design of TSAFM systems. In this study two models (Direct Simulation Monte Carlo and a kinetic theory based macro model) are developed to explore the impact of sub-continuum heat conduction on TSAFM operation and to facilitate improved data interpretation and design.

Original languageEnglish (US)
Article numberIMECE2004-60046
Pages (from-to)165-172
Number of pages8
JournalAmerican Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
DOIs
StatePublished - Jan 1 2004
Externally publishedYes
Event2004 ASME International Mechanical Engineering Congress and Exposition, IMECE - Anaheim, CA, United States
Duration: Nov 13 2004Nov 19 2004

ASJC Scopus subject areas

  • Engineering(all)

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