Thermal Sensing Atomic Force Microscopy (TSAFM) is a promising new technology for topographical imaging and high density data storage that uses the heat transfer between a heated cantilever and the scanned surface as the sensing mechanism. Due to the small operational scan heights (< 300 nm), continuum gas phase heat transfer models (as used in previous studies) cannot accurately describe the actual behavior - affecting the accuracy of data interpretation and design of TSAFM systems. In this study two models (Direct Simulation Monte Carlo and a kinetic theory based macro model) are developed to explore the impact of sub-continuum heat conduction on TSAFM operation and to facilitate improved data interpretation and design.
|Original language||English (US)|
|Number of pages||8|
|Journal||American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS|
|State||Published - Jan 1 2004|
|Event||2004 ASME International Mechanical Engineering Congress and Exposition, IMECE - Anaheim, CA, United States|
Duration: Nov 13 2004 → Nov 19 2004
ASJC Scopus subject areas