@inproceedings{691a732cebbc47a6b843aa848d910528,
title = "Impact of miniaturization on the current handling of electrostatic MEMS resonators",
abstract = "This paper studies the scaling of nonlinearities with miniaturization in double-ended-tuning-fork (DETF) MEMS resonators. We find that the increase in resonant frequency associated with beam length reduction strongly improves current handling; e.g. shortening the beams by a factor of 5 results in a 100-fold increase in sustainable signal current. Using the nonlinear models and scaling observed in this work, we present considerations for optimization of the resonant structure design and the electrostatic gap size.",
author = "Manu Agarwal and Harsh Mehta and Candler, {Robert N.} and Chandorkar, {Saurabh A.} and Bongsang Kim and Hopcroft, {Matthew A.} and Renata Melamud and Gaurav Bahl and Gary Yama and Kenny, {Thomas W.} and Boris Murmann",
year = "2007",
doi = "10.1109/memsys.2007.4433092",
language = "English (US)",
isbn = "1424409519",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "783--786",
booktitle = "Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007",
address = "United States",
note = "20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 ; Conference date: 21-01-2007 Through 25-01-2007",
}